Granted Patent
Utility
US 5,970,366 · App. 08/895,034
Method of removing metallic contaminants from simox substrate
Inventor:
Kensuke Okonogi
Patented Case
View Patent ↗
Granted: Oct 19, 1999
Filed: Jul 16, 1997
Inventor
Kensuke Okonogi
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.