Granted Patent
Utility
US 5,970,621 · App. 09/227,177
Semiconductor wafer cassette positioning and detection mechanism
Inventors:
Kenneth J. Bazydola, Robert Price
Patented Case
View Patent ↗
Granted: Oct 26, 1999
Filed: Jan 7, 1999
Inventors
Kenneth J. Bazydola
Robert Price
Assignee (at issue)
PRI Automation, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.