IP Library Granted Patent US 5,973,371
Granted Patent Utility
US 5,973,371 · App. 08/902,109

Semiconductor device with marginless contact hole

Inventor: Naoki Kasai
Patented Case View Patent ↗
Granted: Oct 26, 1999 Filed: Jul 29, 1997
Inventor
Naoki Kasai
Assignee (at issue)
NEC CORPORATION

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Quick Facts
Patent No.
US 5,973,371
App. No.
08/902,109
Filed
1997-07-29
Granted
1999-10-26
Kind
A