Granted Patent
Utility
US 5,976,222 · App. 09/046,092
Recovery of perfluorinated compounds from the exhaust of semiconductor fabs using membrane and adsorption in series
Inventors:
James H. C. Yang, Iosif Chernyakov, Thomas Hsiao-Ling Hsiung, Alexander Schwarz
Patented Case
View Patent ↗
Granted: Nov 2, 1999
Filed: Mar 23, 1998
Inventors
James H. C. Yang
Iosif Chernyakov
Thomas Hsiao-Ling Hsiung
Alexander Schwarz
Assignee (at issue)
Air Products and Chemicals, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.