Granted Patent
Utility
US 5,976,309 · App. 08/767,698
Electrode assembly for plasma reactor
Inventor:
Carl W. Almgren
Patented Case
View Patent ↗
Granted: Nov 2, 1999
Filed: Dec 17, 1996
Inventor
Carl W. Almgren
Assignee (at issue)
LSI Logic Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.