IP Library › Granted Patent US 5,976,334
Granted Patent Utility
US 5,976,334 · App. 08/978,433

Reliable sustained self-sputtering

Inventors: Jianming Fu, Zheng Xu
Patented Case View Patent ↗
Granted: Nov 2, 1999 Filed: Nov 25, 1997
Inventors
Jianming Fu
Zheng Xu
Assignee (at issue)
Applied Materials, Inc.

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Quick Facts
Patent No.
US 5,976,334
App. No.
08/978,433
Filed
1997-11-25
Granted
1999-11-02
Kind
A