IP Library › Granted Patent US 5,977,601
Granted Patent Utility
US 5,977,601 · App. 09/118,377

Method for etching memory gate stack using thin resist layer

Inventors: Wenge Yang, Lewis Shen
Patented Case View Patent ↗
Granted: Nov 2, 1999 Filed: Jul 17, 1998
Inventors
Wenge Yang
Lewis Shen
Assignee (at issue)
Advanced Micro Devices, Inc.

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Quick Facts
Patent No.
US 5,977,601
App. No.
09/118,377
Filed
1998-07-17
Granted
1999-11-02
Kind
A