Granted Patent
Utility
US 5,978,409 · App. 09/162,341
Line narrowing apparatus with high transparency prism beam expander
Inventors:
Palash P. Das, Alexander I. Ershov, Richard G. Morton
Patented Case
View Patent ↗
Granted: Nov 2, 1999
Filed: Sep 28, 1998
Inventors
Palash P. Das
Alexander I. Ershov
Richard G. Morton
Assignee (at issue)
Cymer, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.