Granted Patent
Utility
US 5,979,244 · App. 09/034,517
Method and apparatus for evaluating internal film stress at high lateral resolution
Inventor:
Alexander Michaelis
Patented Case
View Patent ↗
Granted: Nov 9, 1999
Filed: Mar 4, 1998
Inventor
Alexander Michaelis
Assignee (at issue)
Siemens Aktiengesellschaft
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.