Granted Patent
Utility
US 5,979,474 · App. 09/076,119
Cleaning equipment for semiconductor substrates
Inventor:
Kazuyoshi Manako
Patented Case
View Patent ↗
Granted: Nov 9, 1999
Filed: May 12, 1998
Inventor
Kazuyoshi Manako
Assignee (at issue)
Sumitomo Sitix Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.