Granted Patent
Utility
US 5,980,366 · App. 08/986,898
Methods and apparatus for polishing using an improved plate stabilizer
Inventors:
Thomas Waddle, Karl Kasprzyk
Patented Case
View Patent ↗
Granted: Nov 9, 1999
Filed: Dec 8, 1997
Inventors
Thomas Waddle
Karl Kasprzyk
Assignee (at issue)
SpeedFam-IPEC Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.