Granted Patent
Utility
US 5,980,643 · App. 09/099,309
Alkaline water-based solution for cleaning metallized microelectronic
Inventor:
Michael Jolley
Patented Case
View Patent ↗
Granted: Nov 9, 1999
Filed: Jun 18, 1998
Inventor
Michael Jolley
Assignee (at issue)
Semitool, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.