IP Library › Granted Patent US 5,981,341
Granted Patent Utility
US 5,981,341 · App. 08/986,160

Sidewall spacer for protecting tunnel oxide during isolation trench formation in self-aligned flash memory core

Inventors: Unsoon Kim, Yowjuang W. Liu, Yu Sun, Angela T. Hui
Patented Case View Patent ↗
Granted: Nov 9, 1999 Filed: Dec 5, 1997
Inventors
Unsoon Kim
Yowjuang W. Liu
Yu Sun
Angela T. Hui
Assignee (at issue)
Advanced Micro Devices, Inc.

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Quick Facts
Patent No.
US 5,981,341
App. No.
08/986,160
Filed
1997-12-05
Granted
1999-11-09
Kind
A