Granted Patent
Utility
US 5,981,402 · App. 09/040,912
Method of fabricating shallow trench isolation
Inventors:
Chih-Hsiang Hsiao, Chin-Ching Hsu
Patented Case
View Patent ↗
Granted: Nov 9, 1999
Filed: Mar 18, 1998
Inventors
Chih-Hsiang Hsiao
Chin-Ching Hsu
Assignee (at issue)
United Semiconductor Corp.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.