Granted Patent
Utility
US 5,982,585 · App. 09/000,555
Rotary electrostatic microactuator with optimum flexure arrangement
Inventors:
Long-Sheng Fan, Toshiki Hirano
Patented Case
View Patent ↗
Granted: Nov 9, 1999
Filed: Dec 30, 1997
Inventors
Long-Sheng Fan
Toshiki Hirano
Assignee (at issue)
International Business Machines Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.