Granted Patent
Utility
US 5,982,800 · App. 08/947,474
Narrow band excimer laser
Inventors:
Toshihiko Ishihara, Thomas Hofmann, Palash P. Das, Alexander I. Ershov
Patented Case
View Patent ↗
Granted: Nov 9, 1999
Filed: Oct 10, 1997
Inventors
Toshihiko Ishihara
Thomas Hofmann
Palash P. Das
Alexander I. Ershov
Assignee (at issue)
Cymer, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.