Granted Patent
Utility
US 5,983,479 · App. 08/803,668
Apparatus and method of automatically removing a wafer carrier from a container
Inventor:
Akira Sato
Patented Case
View Patent ↗
Granted: Nov 16, 1999
Filed: Feb 21, 1997
Inventor
Akira Sato
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.