Granted Patent
Utility
US 5,984,541 · App. 09/083,098
Resist processing system
Inventor:
Hiroshi Yoshino
Patented Case
View Patent ↗
Granted: Nov 16, 1999
Filed: May 22, 1998
Inventor
Hiroshi Yoshino
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.