Granted Patent
Utility
US 5,985,378 · App. 08/953,604
Remote-plasma-CVD method for coating or for treating large-surface substrates and apparatus for performing same
Inventor:
Volker Paquet
Patented Case
View Patent ↗
Granted: Nov 16, 1999
Filed: Oct 17, 1997
Inventor
Volker Paquet
Assignee (at issue)
Schott Glaswerke
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.