Granted Patent
Utility
US 5,986,347 · App. 09/107,930
Processing methods of forming contact openings and integrated circuitry
Inventors:
Kevin G. Donohoe, Kirk D. Prall
Patented Case
View Patent ↗
Granted: Nov 16, 1999
Filed: Jun 30, 1998
Inventors
Kevin G. Donohoe
Kirk D. Prall
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.