Granted Patent
Utility
US 5,986,874 · App. 08/868,041
Electrostatic support assembly having an integral ion focus ring
Inventors:
Eric D. Ross, Jae Kyu Park, Alexandre De Chambrier
Patented Case
View Patent ↗
Granted: Nov 16, 1999
Filed: Jun 3, 1997
Inventors
Eric D. Ross
Jae Kyu Park
Alexandre De Chambrier
Assignee (at issue)
Watkins-Johnson Company, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.