Granted Patent
Utility
US 5,987,921 · App. 09/059,341
Method for making a semiconductor acceleration sensor
Inventor:
Katsumichi Ueyanagi
Patented Case
View Patent ↗
Granted: Nov 23, 1999
Filed: Jan 14, 1998
Inventor
Katsumichi Ueyanagi
Assignees (at issue)
FUJI ELECTRIC CO., LTD.
FUJITSU TEN LIMITED
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.