Granted Patent
Utility
US 5,989,760 · App. 09/040,471
Method of processing a substrate utilizing specific chuck
Inventors:
Pawitter Mangat, William J. Dauksher
Patented Case
View Patent ↗
Granted: Nov 23, 1999
Filed: Mar 18, 1998
Inventors
Pawitter Mangat
William J. Dauksher
Assignee (at issue)
Motorola, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.