Granted Patent
Utility
US 5,989,929 · App. 09/119,588
Apparatus and method for manufacturing semiconductor device
Inventors:
Hideo Nikoh, Shinichi Imai, Nobuhiro Jiwari, Satoshi Nakagawa, Shoji Matsumoto, Yoji Bito
Patented Case
View Patent ↗
Granted: Nov 23, 1999
Filed: Jul 21, 1998
Inventors
Hideo Nikoh
Shinichi Imai
Nobuhiro Jiwari
Satoshi Nakagawa
Shoji Matsumoto
Yoji Bito
Assignee (at issue)
Matsushita Electronics Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.