Granted Patent
Utility
US 5,993,546 · App. 08/951,486
Apparatus for forming a solid thin film from a layer of liquid material without void
Inventor:
Kazumi Sugai
Patented Case
View Patent ↗
Granted: Nov 30, 1999
Filed: Oct 16, 1997
Inventor
Kazumi Sugai
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.