Granted Patent
Utility
US 5,994,022 · App. 08/965,432
Radiation sensitive resin composition
Inventors:
Takayoshi Tanabe, Eiichi Kobayashi, Makoto Shimizu, Shin-ichiro Iwanaga
Patented Case
View Patent ↗
Granted: Nov 30, 1999
Filed: Nov 6, 1997
Inventors
Takayoshi Tanabe
Eiichi Kobayashi
Makoto Shimizu
Shin-ichiro Iwanaga
Assignee (at issue)
JSR CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.