Granted Patent
Utility
US 5,994,036 · App. 08/805,153
Method of forming a resist pattern
Inventor:
Katsuyuki Itoh
Patented Case
View Patent ↗
Granted: Nov 30, 1999
Filed: Feb 24, 1997
Inventor
Katsuyuki Itoh
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.