Granted Patent
Utility
US 5,994,232 · App. 09/137,522
Etching method for use in fabrication semiconductor device
Inventor:
Darwin A. Clampitt
Patented Case
View Patent ↗
Granted: Nov 30, 1999
Filed: Aug 20, 1998
Inventor
Darwin A. Clampitt
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.