Granted Patent
Utility
US 5,994,430 · App. 08/841,750
Antireflective coating compositions for photoresist compositions and use thereof
Inventors:
Shuji Ding, Ping-Hung Lu, Dinesh N. Khanna, Jianhui Shan, Dana L. Durham, Ralph R. Dammel, M. Dalil Rahman
Patented Case
View Patent ↗
Granted: Nov 30, 1999
Filed: Apr 30, 1997
Inventors
Shuji Ding
Ping-Hung Lu
Dinesh N. Khanna
Jianhui Shan
Dana L. Durham
Ralph R. Dammel
M. Dalil Rahman
Assignee (at issue)
Clariant Finance (BVI) Limited
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.