Granted Patent
Utility
US 5,996,498 · App. 09/122,261
Method of lithographic imaging with reduced debris-generated performance degradation and related constructions
Inventor:
Thomas E. Lewis
Patented Case
View Patent ↗
Granted: Dec 7, 1999
Filed: Jul 24, 1998
Inventor
Thomas E. Lewis
Assignee (at issue)
PRESSTEK, LLC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.