Granted Patent
Utility
US 5,996,595 · App. 08/908,345
Semiconductor wafer cleaning system
Inventors:
Michael B. Olesen, Mario E. Bran
Patented Case
View Patent ↗
Granted: Dec 7, 1999
Filed: Aug 7, 1997
Inventors
Michael B. Olesen
Mario E. Bran
Assignee (at issue)
Verteq, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.