IP Library › Granted Patent US 5,997,713
Granted Patent Utility
US 5,997,713 · App. 09/074,712

Silicon etching process for making microchannel plates

Inventors: Charles Pershing Beetz, Robert W. Boerstler, John Steinbeck, David R. Winn
Patented Case View Patent ↗
Granted: Dec 7, 1999 Filed: May 8, 1998
Inventors
Charles Pershing Beetz
Robert W. Boerstler
John Steinbeck
David R. Winn
Assignee (at issue)
NanoSciences Corporation

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Quick Facts
Patent No.
US 5,997,713
App. No.
09/074,712
Filed
1998-05-08
Granted
1999-12-07
Kind
A