Granted Patent
Utility
US 5,999,720 · App. 09/019,692
Post exposure bake simulation method
Inventor:
Hirotomo Inui
Patented Case
View Patent ↗
Granted: Dec 7, 1999
Filed: Feb 6, 1998
Inventor
Hirotomo Inui
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.