IP Library › Granted Patent US 6,000,280
Granted Patent Utility
US 6,000,280 · App. 09/045,573

Drive electrodes for microfabricated torsional cantilevers

Inventors: Scott Miller, Kimberly L. Turner, Noel C. MacDonald
Patented Case View Patent ↗
Granted: Dec 14, 1999 Filed: Mar 23, 1998
Inventors
Scott Miller
Kimberly L. Turner
Noel C. MacDonald
Assignee (at issue)
Cornell Research Foundation, Inc.

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Quick Facts
Patent No.
US 6,000,280
App. No.
09/045,573
Filed
1998-03-23
Granted
1999-12-14
Kind
A