Granted Patent
Utility
US 6,000,862 · App. 08/725,846
Substrate developing method and apparatus
Inventors:
Seiichiro Okuda, Kenji Sugimoto
Patented Case
View Patent ↗
Granted: Dec 14, 1999
Filed: Oct 4, 1996
Inventors
Seiichiro Okuda
Kenji Sugimoto
Assignee (at issue)
DAINIPPON SCREEN MFG. CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.