Granted Patent
Utility
US 6,000,900 · App. 08/791,666
Wafer cassette conveying system
Inventor:
Teruo Isogai
Patented Case
View Patent ↗
Granted: Dec 14, 1999
Filed: Jan 30, 1997
Inventor
Teruo Isogai
Assignee (at issue)
Nippon Steel Semiconductor Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.