Granted Patent
Utility
US 6,001,005 · App. 09/071,442
Polishing apparatus
Inventors:
Robert Luke Anderson, Michael Manseau, Janusz Aleksander Derza, John Edward Bussan
Patented Case
View Patent ↗
Granted: Dec 14, 1999
Filed: May 1, 1998
Inventors
Robert Luke Anderson
Michael Manseau
Janusz Aleksander Derza
John Edward Bussan
Assignee (at issue)
SPEEDFAM CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.