Granted Patent
Utility
US 6,001,183 · App. 08/723,682
Wafer carriers for epitaxial growth processes
Inventors:
Alexander I. Gurary, Eric A. Armour, Douglas A. Collins, Richard A. Stall
Patented Case
View Patent ↗
Granted: Dec 14, 1999
Filed: Sep 30, 1996
Inventors
Alexander I. Gurary
Eric A. Armour
Douglas A. Collins
Richard A. Stall
Assignee (at issue)
EMCORE CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.