Granted Patent
Utility
US 6,001,189 · App. 08/724,578
Method for reducing gaseous species of contamination in wet processes
Inventor:
J. Brett Rolfson
Patented Case
View Patent ↗
Granted: Dec 14, 1999
Filed: Sep 30, 1996
Inventor
J. Brett Rolfson
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.