Granted Patent
Utility
US 6,001,267 · App. 08/804,212
Plasma enchanced chemical method
Inventors:
Ron van Os, William J. Durbin, Richard H. Matthiesen, Dennis C. Fenske, Eric D. Ross
Patented Case
View Patent ↗
Granted: Dec 14, 1999
Filed: Feb 21, 1997
Inventors
Ron van Os
William J. Durbin
Richard H. Matthiesen
Dennis C. Fenske
Eric D. Ross
Assignee (at issue)
Watkins-Johnson Company, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.