Granted Patent
Utility
US 6,002,135 · App. 09/007,018
Magnetic lens and deflector with inner and outer pole pieces with conical inner pole piece
Inventors:
Lee H. Veneklasen, William J. DeVore
Patented Case
View Patent ↗
Granted: Dec 14, 1999
Filed: Jan 14, 1998
Inventors
Lee H. Veneklasen
William J. DeVore
Assignee (at issue)
ETEC SYSTEMS, INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.