Granted Patent
Utility
US 6,002,263 · App. 08/870,335
Probe station having inner and outer shielding
Inventors:
Ron A. Peters, Leonard Hayden, Jeffrey A. Hawkins, R. Mark Dougherty
Patented Case
View Patent ↗
Granted: Dec 14, 1999
Filed: Jun 6, 1997
Inventors
Ron A. Peters
Leonard Hayden
Jeffrey A. Hawkins
R. Mark Dougherty
Assignee (at issue)
Cascade Microtech, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.