Granted Patent
Utility
US 6,002,791 · App. 08/907,736
Photomask inspection apparatus
Inventor:
Takehiko Okada
Patented Case
View Patent ↗
Granted: Dec 14, 1999
Filed: Aug 8, 1997
Inventor
Takehiko Okada
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.