Granted Patent
Utility
US 6,003,243 · App. 08/596,245
Wafer cleaning apparatus and method thereof
Inventor:
Tadahiro Ohmi
Patented Case
View Patent ↗
Granted: Dec 21, 1999
Filed: Mar 26, 1996
Inventor
Tadahiro Ohmi
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.