Granted Patent
Utility
US 6,004,839 · App. 08/804,112
Semiconductor device with conductive plugs
Inventors:
Yoshihiro Hayashi, Nobuhiro Tanabe, Tsuneo Takeuchi, Shinobu Saito
Patented Case
View Patent ↗
Granted: Dec 21, 1999
Filed: Feb 20, 1997
Inventors
Yoshihiro Hayashi
Nobuhiro Tanabe
Tsuneo Takeuchi
Shinobu Saito
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.