Granted Patent
Utility
US 6,004,850 · App. 09/028,101
Tantalum oxide anti-reflective coating (ARC) integrated with a metallic transistor gate electrode and method of formation
Inventors:
Kevin Lucas, Olubunmi O. Adetutu, Christopher C. Hobbs, Yolanda Musgrove, Yeong-Jyh T. Lii
Patented Case
View Patent ↗
Granted: Dec 21, 1999
Filed: Feb 23, 1998
Inventors
Kevin Lucas
Olubunmi O. Adetutu
Christopher C. Hobbs
Yolanda Musgrove
Yeong-Jyh T. Lii
Assignee (at issue)
Motorola, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.