Granted Patent
Utility
US 6,005,225 · App. 08/827,542
Thermal processing apparatus
Inventors:
Jeffrey M. Kowalski, Christopher Ratliff, Terry A. Koble, Jr., Jon H. Pack, Michael H. Yang
Patented Case
View Patent ↗
Granted: Dec 21, 1999
Filed: Mar 28, 1997
Inventors
Jeffrey M. Kowalski
Christopher Ratliff
Terry A. Koble, Jr.
Jon H. Pack
Michael H. Yang
Assignee (at issue)
Silicon Valley Group, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.