Granted Patent
Utility
US 6,005,247 · App. 08/942,334
Electron beam microscope using electron beam patterns
Inventor:
Aaron W. Baum
Patented Case
View Patent ↗
Granted: Dec 21, 1999
Filed: Oct 1, 1997
Inventor
Aaron W. Baum
Assignee (at issue)
INTEVAC, INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.