Granted Patent
Utility
US 6,005,879 · App. 09/034,870
Pulse energy control for excimer laser
Inventors:
Richard L. Sandstrom, Herve A. Besaucele, Igor V. Fomenkov, Palash P. Das
Patented Case
View Patent ↗
Granted: Dec 21, 1999
Filed: Mar 4, 1998
Inventors
Richard L. Sandstrom
Herve A. Besaucele
Igor V. Fomenkov
Palash P. Das
Assignee (at issue)
Cymer, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.