Granted Patent
Utility
US 6,006,736 · App. 09/000,061
Method and apparatus for washing silicon ingot with water to remove particulate matter
Inventors:
Yoshihiro Suzuki, Koichi Kato, Keiichi Takami, Ryoichi Kawamura, Takehiro Watanabe, Masahiro Kosako
Patented Case
View Patent ↗
Granted: Dec 28, 1999
Filed: Apr 21, 1998
Inventors
Yoshihiro Suzuki
Koichi Kato
Keiichi Takami
Ryoichi Kawamura
Takehiro Watanabe
Masahiro Kosako
Assignee (at issue)
MEMC Electronic Materials, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.